Method and apparatus for demultiplexing optical signals in a passive optical network

ABSTRACT

Methods and structures are disclosed demultiplexing optical signals transmitted over an optical fiber into a silicon substrate and to multiple detectors. The silicon substrate has two spaced-apart surfaces and a diffractive element disposed adjacent to one of the surfaces. Each of the optical signals corresponds to one of multiple wavelengths. The optical signals are directed into the silicon substrate along a path through the first surface to be incident on the diffractive element. The path is oriented generally normal with the first surface and/or with the diffractive element, which angularly separates the optical signals such that each of the wavelengths traverses through the substrate in a wavelength dependent direction to the first surface. Each optical signal is steered from the first surface towards the second surface to be incident on different optical elements that direct them generally normal to the first surface to be incident on one of the detectors.

CROSS REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. patent application Ser. No.11/771,760, entitled “METHOD AND APPARATUS FOR DEMULTIPLEXING OPTICALSIGNALS IN A PASSIVE OPTICAL NETWORK,” filed Jun. 29, 2007, which is anonprovisional of, and claims the benefit of the filing date of, U.S.Provisional Patent Application Ser. No. 60/806,348, entitled“MULTIPLEXED OPTICAL SUBASSEMBLY,” filed Jun. 30, 2006, the entiredisclosures of which are incorporated herein by reference for allpurposes.

This application is related to commonly assigned U.S. patent applicationSer. No. 11/771,716, entitled “OPTICAL ASSEMBLIES AND METHODS FORFABRICATION OF OPTICAL ASSEMBLIES,” filed Jun. 29, 2007, the entiredisclosure of which is incorporated herein by reference for allpurposes.

BACKGROUND OF THE INVENTION

This application relates generally to optical routing. Morespecifically, this application relates to passive optical networks.

Fiber-optic telecommunications systems are currently deployingwavelength division multiplexing (“WDM”) as a mechanism for expandingthe capacity of new and existing optical fiber systems. In WDM, multiplewavelengths of radiation simultaneously transport information through asingle optical fiber. Each wavelength operates as an individual channelcarrying a stream of data.

A passive optical network (“PON”) is a communications architecture inwhich each single optical fiber transmits multiple channels ofinformation in this way as distinct wavelengths of radiation. Thenetwork is termed “passive” because the wavelengths are combined(multiplexed) and separated (demultiplexed) using wavelength-selectivesplitters or couplers rather than active switching or variable routingcomponents. One example of a PON is the distribution of video(television, cable TV, and/or video downloads), analog or digitaltelephone (local, long-distance, and/or VoIP), and digital computer data(Internet or network connectivity) from a service provider to amultiplicity of subscribers via optical fiber-to-the-premises (“FTTP” or“FTTx”) connections. At or near each subscriber/user location along sucha PON, it is generally necessary to receive and demultiplex two or threeincoming optical signals from a single optical fiber. This may be doneat relatively wide wavelength spacing compared with the dense wavelengthdivision multiplexing that is used for long-haul transmissions. At leaston optical signal is multiplexed and transmitted back into the opticalfiber at a distinct wavelength.

For example, in one implementation, downstream traffic is provided on a1490-nm channel and upstream traffic is provided on a 1310-nm channel.In another implementation, an additional 1550-nm band is allocated fordownstream rf video traffic.

There are a number of different PON standards in existence. The ITU-TG.983 standard defines standards for ATM PONs (“APON”) and broadbandPONs (“BPON”). These represent the earliest PON standards, with BPONbuilding on the APON standard to provide support for wavelength divisionmultiplexing as well as better upstream bandwidth allocation. There hasbeen more recent interest in the ITU-T G.984 standard, which supportshigher rates and enhanced security as a further evolution of the BPONstandard. In addition, the IEEE 802.3ah standard provides a standard forusing Ethernet for packet data. Emerging approaches for providingcustomers with the “triple-play” of services described above over acommon system or network require data-transfer rates in thegigabit/second (Gb/s) range or higher, which can be most easily achievedusing optical rather than electronic (“copper”) transmission lines,leading to the nomenclature “GPON” for gigabit passive optical networks.

In implementing any of these various PONs, there is a general need forstructures to manage the transmission of the different signals, bothdownstream and upstream. Current implementations suffer from a number ofdeficiencies. For example, persistent concerns with structures that areused exist in the isolation of the different wavelengths, the need tocontrol the absorption of stray radiation, and the cost of fabrication.

BRIEF SUMMARY OF THE INVENTION

Embodiments of the invention provide methods and structures fordirecting radiation. Embodiments of the invention simultaneously addressmultiple problems that persist with PON structures currently used. Thisis achieved in embodiments of the invention by using low-cost siliconfabrication methods that provide high precision to produce a structurethat effectively manages wavelength isolation and stray radiation toprovide efficient multiplexing and demultiplexing operations. The use oflow-cost small-silicon-chip processes permits the use of small beams intightly controlled free space instead of the use of waveguides,providing improved insertion loss and cost.

The structure makes use of grating in reflective mode for efficiency andmay be produced with a low etch depth for fabrication. A focal spot maythen be used that is large enough to operate the PON efficiently, butsmall enough to separate two beams with dispersion from the grating. Thestructure provides high absorption of radiation and the size of thegrating coupling discriminates the wavelengths, thereby allowing the useof larger aperture detectors for improved tolerance in placement. Beamsmay be coupled in and out of the chip at near normal incidence forimproved optical performance, especially for polarization and placement.

The use of silicon fabrication methods allows the parallel surfaces ofthe silicon wafers to be used to provide predictable beam angles.Standard chip-assembly techniques using low-cost passive pick-and-placetools greatly improve the fabrication efficiency over other techniques.

The result is a solution to the issue of producing PONs that uses smallbeams in tightly controlled free space instead of waveguides to provideimproved insertion loss and cost. A wavelength separation of 60-180 nmcan be well achieved with a 100-μm-diameter spacing, with about a 1-μmpitch. Merely by way of example, a focal spot diameter of 25 μm has afocus range of about 1 mm in silicon, allowing spots to be welldiscriminated within the geometry of the structure.

These and other embodiments of the present invention, as well as itsadvantages and features are described in more detail in conjunction withthe text below and attached figures.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 provides a schematic illustration of an optical assembly inaccordance with embodiments of the invention;

FIG. 2 provides a schematic illustration of a structure that may be usedfor an optical coupler in some embodiments;

FIG. 3 is a flow diagram that summarizes methods of directing radiationin accordance with embodiments of the invention;

FIG. 4 is a flow diagram that summarizes methods of fabricating anoptical subassembly in accordance with embodiments of the invention;

FIG. 5 is a diagram illustrating intermediate stages in the fabricationof a diffraction grating integral with a surface of an opticalsubassembly;

FIG. 6 is a diagram defining different orders of reflective andtransmissive diffraction from a diffraction grating of the type producedusing the technique illustrated in FIG. 5; and

FIG. 7 provides graphs demonstrating a comparison of diffractionefficiencies for different diffraction-grating characteristics.

DETAILED DESCRIPTION OF THE INVENTION

Embodiments of the invention provide optical assemblies that may be usedin directing radiation. Such optical assemblies find particularapplication in applications in which the radiation is directed through aPON, although they may be amenable to uses in other applications also.Rather than adopt a conventional approach to providing such an opticalassembly, the inventors have applied their experience withsemiconductor-processing techniques to develop a structure that uses asemiconductor substrate to provide a quasi-free-space optical platform.Structural elements of an optical subassembly are fabricated usingsemiconductor lithographic techniques, providing a structure that may beproduced at a cost significantly lower than structures produced usingmore conventional techniques.

In certain embodiments, the fabrication techniques advantageouslyexploit the availability of pick-and-place methods for accuratefabrication of structures. The use of semiconductor-processingtechniques in this way results in a structure that has good strength,optical stiffness and humidity control.

A typical structure in one embodiment is shown with the schematicdiagram of FIG. 1. In this illustration, the optical assembly isidentified by reference number 100 and comprises an optical subassembly160, which may be produced using the semiconductor lithographictechniques described in greater detail below. The optical assembly 100includes a number of additional elements in addition to the opticalsubassembly 160 that are used principally to provide radiation to andreceive radiation from the subassembly 160, with the subassembly 160performing the optical routing functions.

Radiation may be provided to the optical subassembly from two sources,corresponding to sources for downstream and upstream traffic. Downstreamtraffic 112 is provided by an optical fiber 104 that is coupled to anoptical coupler 108, which expands the size of the beam 112 on which thetraffic is carried and collimates it for delivery to the subassembly160. The optical coupler 108 may be mounted in different positions indifferent embodiments, with it being surface mounted in someembodiments. The radiation is directed through a deflector 120 into thesubassembly 160 through a first surface 166 and propagates to one of aplurality of diffraction gratings 184 formed integrally with a secondsurface 170 of the subassembly 160. The second surface 170 is providedopposite the first surface 166 and may be substantially parallel to thefirst surface 166.

Radiation 112 from the optical coupler 108 is directed substantiallynormally to the first surface 166 and undergoes angular separation byits encounter with the first diffraction grating. Different wavelengthcomponents of the radiation accordingly propagate differently within thesubassembly 160. For instance, a first path 168 may be followed by afirst wavelength component, being directed to another of the diffractiongratings 184-3. This diffraction grating 184-3 has the effect ofreversing the angular redirection of the single wavelength component sothat this portion of the signal is now again directed substantiallyperpendicular to the first surface to a first detector 136-1. Suchpropagation is again substantially normal to the first surface 166 andmay proceed through a first aperture 144-1 and deflector 140-1.

Similarly, a second path 172 may be followed by a second wavelengthcomponent to another of the diffraction gratings 184-4. This diffractiongrating 184-4 also has the effect of removing the angular separation todirect this wavelength component substantially normally to the firstsurface 166 to a second detector 136-2. Again, the propagation mayproceed through a second aperture 144-2 and a second deflector 140-2before encountering the detector 136-2.

Other radiation separated angularly by the first diffraction grating184-1 may propagate along a further path 176 in still a similar fashion,with its angular separation being removed by still another diffractiongrating 184-5. This radiation is collected by an optical absorber 148after propagating substantially normally through the first surface 166,perhaps after encountering a further aperture 156 and deflector 152.Collection of this additional radiation by the absorber acts to avoidinterference with the other signals by preventing stray radiation frombeing propagated within the subassembly to be received by either of thewavelength detectors 136.

As shown in the drawing, each of the paths 168, 172, and 176 followed bythe separated radiation undergoes at least one reflection from the firstsurface 166 within the subassembly 160. In the illustrated embodiment,each path 168, 172, and 176 undergoes a single reflection, but otherembodiments may provide for multiple reflections from the first surface166. To improve the efficiency of coupling the radiation from thedownstream beam to the different detectors 136, the first surface 166may be covered with a highly reflective coating 180 such as a metal. Thecoating 180 ensures that losses due to the reflection are minimized andis formed in regions of the first surface 166 where reflections of thesignals are to occur according to the geometry of the subassembly andthe optical characteristics of the diffraction gratings 184.

In converse fashion, the diffraction gratings may be patterned for highreflection, such as by including materials in their fabrication thatincrease reflectivity. The second surface 170 may also be coveredbetween the diffraction gratings with an absorber material 174. Thisadvantageously minimizes the level of crosstalk between the differentwavelength channels by absorbing any stray radiation from a particularchannel before it can follow a path to an unintended detector 136.Specifically, the different angular direction of propagation of thedifferent wavelength channels permits the detectors to be positioned sothat the Gaussian overlay of the different signals is minimized. Forinstance, with two downstream channels at 1490 nm and 1550 nm, theconfiguration of the structure causes the input of the 1490-nm beamdetected by the 1550-nm detector to be minimized and for the input ofthe 1550-nm beam detected by the 1490-nm detector to be minimized. Theadditional inclusion of the absorber 174 further reduces the potentialfor crosstalk.

The upstream traffic operates in a generally similar manner butpropagates in the opposite direction. The upstream radiation source isshown in the drawing as a laser 124, although other types of sources maybe used in alternative embodiments. Radiation is directed from the laser124 into the subassembly 160 substantially normally to the first surface166 towards one of the diffraction gratings 184-2. In some instances,the radiation may pass through a deflector 128 and aperture 132. Theradiation is angularly redirected by the diffraction grating 184-2 alongpath 164 to the first diffraction grating 184-1, which introduces acomplementary angular redirection to propagate the radiation upstreaminto the optical coupler 108 where it is integrated as an upstreamsignal 116 in the optical fiber 104.

There are a number of aspects of the structure shown in FIG. 1. Theoptical path is folded, making the overall size of the chip smaller. Asa consequence, thermal expansion of the system does not significantlyaffect the coupling. Coupling efficiency is also effectivelyaccommodated with the expansion of the beam size by the optical coupler108. The desired coupling efficiency can still be achieved when the beamis expanded within tolerances that are 5-25 times as large as for anunexpanded beam.

In some embodiments, the subassembly is fabricated with a siliconsubstrate, although other materials may be used in other embodiments. Itis generally desirable that the substrate material be substantiallytransparent at the wavelengths used by the various optical signals. Forexample, when downstream wavelengths are 1490 nm and/or 1550 nm and theupstream wavelength is 1310 nm, the substrate is preferablysubstantially transparent at infrared wavelengths. Other examples ofmaterials that may be used include sapphire and glass. Notably, siliconhas a relatively large refractive index, being n=3.5 as compared withn=1.5 for glass. The higher refractive index makes the radiation travelmore slowly within the material so that the gratings may be madesmaller.

FIG. 2 provides an illustration of a structure that may be used for theoptical coupler 108 in some embodiments. This configuration isespecially suitable for embodiments in which the optical couplercomprises a surface-mounted optical coupler. In such an embodiment, theoptical coupler 108 comprises an integrally fabricated structure thatincludes a collimating lens 24, a mirrored surface 26 angled 45°relative to the optical axis 28 of the collimating lens 24, a shortrod-shaped extension 30 that has a flat optical surface 32 at itsexposed end, and a cylindrically shaped support or tube extension 34that supports and aligns the optical coupler against a chip. Buttedagainst the flat surface of the extension 30 is an optical fiber pigtail38 that characteristically includes a fiber core 40 surrounded by fibercladding 42, which is in turn surrounded by a fiber buffer layer 44 thatprotects the inner structure. A polymer boot 46 surrounds the end of theoptical fiber pigtail 38 and part of extension 30 and serves both toprovided a mechanism of anchoring the assembly to an extension arm of achip carrier to protect the optical fiber from being damaged duringhandling. When the optical coupler 108 is mounted on the backside of achip, it aligns its collimating lens 24 with a focusing lens andmaintains them at a predetermined distance from each other with anintermediate air gap separating them.

FIG. 3 provides a flow diagram that summarizes methods of directingradiation in accordance with embodiments of the invention. At block 204,a radiation beam is transmitted downstream from an optical fiber to anoptical coupler. The expansion of the beam size and its collimation withthe optical coupler are indicated at block 208. The collimated andexpanded beam is transmitted at block 212 to the subassembly chipsubstantially normally to the first surface 166. Angular separation ofthe wavelength components within the subassembly chip occurs at block216, permitting the first wavelength component to be directedsubstantially normally to the first surface 166 after reflection withinthe subassembly chip at block 220. When the radiation beam comprises aplurality of wavelength components, the second wavelength component issimilarly directed substantially normally to the first surface 166 afterreflection within the chip at block 224.

The absorption of radiation to avoid spurious transmission to thewavelength detectors is noted at block 228, with separation beingmaintained between the first and second wavelength components at block232 to avoid crosstalk. While blocks 204-232 generally indicate how thedownstream transmission of signals is effected, upstream transmission oflaser radiation is indicated at blocks 236-248. The laser radiation istransmitted into the subassembly chip at block 236, again substantiallynormally to the first surface 166. After reflection within the chip, itis directed substantially normally at block 240 to the optical coupler.Coupling of the radiation into an optical fiber at block 244 allows theupstream transmission of the signal.

There are a variety of different ways in which the optical subassemblymay be manufactured in different embodiments. FIG. 4 provides a flowdiagram that illustrates one such process. FIG. 4 is organized byseparately illustrating steps performed at different locations, as mightbe done when a portion of the fabrication process is performed at a CMOSfoundry and a remainder of the process is performed at a thin-filmhouse. The left column in the drawing corresponds to those stepsadvantageously performed at the CMOS foundry and the right columncorresponds to those steps advantageously performed at the thin-filmhouse. This organization of the steps is not intended to be limiting. Inother embodiments, all of the steps might be performed at a singlelocation or the number of locations at which the process is completedmight be greater than two.

The method in this embodiment begins at block 304 with a silicon wafer,whose backside is nitride passivated at block 308. For instance, thewafer might comprise a wafer having an 8-inch diameter with a thicknessof 725±10 μm, polished on both sides. The nitride passivation mayinvolve deposition of a thickness of approximately 1000 Å in aparticular implementation. The wafer is prepared to have a definedthickness at block 312. This may be accomplished by measuring the waferthickness and using a combination of grinding and polishing to achievethe desired thickness. In one specific embodiment, the wafer is preparedwith a thickness of 700±2 μm. Particles may be removed by a subsequentcleaning and degreasing of the thinned wafer. At block 316, the backsidenitride may be removed. This may be followed by nitride passivation ofthe frontside of the wafer at block 320. Alignment marks may be providedto the wafer backside using dry-etch techniques at block 324.

Such preliminary preparations permit the lithographic formation of thediffraction gratings on the backside at block 328. This may beaccomplished, for example, by using a combination of depositingphotoresist, and producing trenches by application of photolithographicand etching techniques as known in the art. A plurality of gratings maybe formed in this way, the actual number perhaps depending on thespecific application for the subassembly.

This prepatory work may be followed by removing the frontside nitride atblock 332, followed by a silica passivation deposition on the backsideat block 336. The deposition may proceed to produce a silica thicknessin a particular embodiment of about 1000 Å. Alignment marks aretransferred to the wafer frontside at block 340. This is followed by theformation of Ti silicide on the frontside at block 344. A blanket ofSiO₂ may be deposited on the frontside, reaching a thickness of about5000 Å in one embodiment. The SiO₂ is patterned for the silicide patternand etched, using the silicon substrate as a stop. Titanium is blanketsputtered on the front side, with thermal annealing being used toproduce the Ti silicide. A few minutes of annealing at a temperature ofabout 700° C. is sufficient. Other annealing techniques may be used incertain alternative embodiments. A wet etch may be used to removeresidual titanium metal that is not in contact with the siliconsubstrate, followed by deposition of SiO₂ on the frontside. Thisadditional deposition provides protection for the chuck from titaniumand silicide contamination.

Backside dielectric protection may be removed at block 348, with blanketdeposition of reflector metal then taking place on the backside at block352. This completes the partial preparation at the CMOS foundry so thatthe wafers may be packaged for transport at block 356.

Subsequent processing the wafers at the thin-film house may begin atblock 360 with receipt of a wafer from the CMOS foundry. Using thespecific example discussed above, such an incoming wafer has a diameterof about eight inches and a thickness of 700±2 μm. The frontside isprotective coated with an oxide or nitride over optical-quality siliconpolished windows. The backside is coated with a reflector metal.

At block 364, the processing of such a wafer continues by removing theprotective film from the frontside. An antireflective stack is blanketdeposited on the frontside at block 368. For instance, a broadbandantireflective coating that covers an infrared region between 1310 and1550 nm may be deposited, followed by a SiO₂ top layer. at block 372,trace and mirror metallization are formed lithographically. A multilayermetallization may be used in one embodiment, such as when a Ti/Ni/Austructure is used. Formation of the metallization layer may usephotoresist and contact-lithography techniques, coupled with an acetonelift-off pattern. The metallization is compatible for wire bonding. atblock 376, solder metallization is formed lithographically using asimilar technique. Again, a multilayer structure may be used, such as byusing a Cr/NiV/AuSn structure in one embodiment. A suitable solder stackthickness in an embodiment is about 0.5 μm. A gold oxidation protectioncap may sometimes be applied, perhaps depending on the thickness of thesolder stack.

The production of the subassembly chips is essentially complete at thisstage. The chips are accordingly singulated from the wafer at block 380.When fabrication takes place in two facilities, there is generally nocrossover of wafer processing between the facilities, i.e. no resistdeposit and processing crossover, although this is not a requirement ofthe invention. In such instances, all processes and quality control arethe sole ownership of either the CMOS foundry or the thin-film house. Inaddition, wafers generally do not re-enter the CMOS foundry afterprocessing in the thin-film house. This alleviates issues related towafer cleaning of particulates and materials contamination at the CMOSfoundry. This accommodates the fact that the thin-film house may havelower cleanroom controls than the CMOS foundry. It is generally the casethat thin-film houses do not have automated wafer handling andprocessing capabilities. Implementation of automated wafer handling isthus limited by small production volumes rather than by processcompatibility.

There are a variety of different structures that may be used for thediffraction gratings. In one embodiment, the gratings are produced usinga binary optics technique illustrated in FIG. 5. This technique formsinitial trenches at the pitch of the final grating and progressivelyintroduces additional features, as may be understood more clearly withreference to the drawing. An initially flat substrate may be formed intoa two-level structure 404 by etching trenches 428 at the grating pitch.This process is repeated at half the pitch as indicated with structure408. Trenches 428 at half the pitch are formed by using lithographictechniques and are etched to a depth half that of the initial trenches.This produces a four-level structure 412 having profile 432. The processis repeated again at a quarter of the pitch as indicated with structure416. Trenches 436 at a quarter the pitch are formed by usinglithographic techniques and are etched to a depth a quarter that of theinitial trenches. This produces an eight-level structure 420 havingprofile 440.

The result of this type of processing produces a diffraction-gratingstructure having the same initial pitch as the first structure 404, buthaving a total depth that is the sum of the depths of the trenchesetched at each processing level. In the example of an eight-levelstructure, the total depth is

$\left( {1 + \frac{1}{2} + \frac{1}{4}} \right) = \frac{7}{4}$of the initial trench depth. Even with such a general type of gratingstructure, there are thus at least three parameters that may potentiallyby varied to alter the optical characteristics of the structure: thenumber of levels, the total depth, and the pitch (or some surrogate forthese three independent parameters).

In determining preferred values for these parameters, one opticalcharacteristic that is relevant is the polarization-dependent loss ofthe grating. This is a characteristic that is frequently of concern inevaluating grating performance, for a variety of different gratingdesigns. The inventors have accordingly performed simulations toevaluate the polarization characteristics of different gratings in whichthese parameters are varied. FIG. 6 shows schematically the effect of agrating 508 on an incident beam 504. A portion of the incident radiation504 is reflected by the grating 508 and a portion is transmitted. Thereflected and transmitted radiation are shown in terms of a spectraldecomposition into different transmitted (“T”) and reflected (“R”)orders. In certain embodiments, an eight-level grating is used as acost-effective midpoint between fewer numbers of levels that provideworkable results and higher numbers of levels that may significantlyincrease production costs. But gratings with different levels may beused effectively in a number of embodiments.

One set of results is shown in FIG. 7 for an eight-level diffractiongrating having a 0.8 μm pitch when radiation having a wavelength of 1490nm is incident. The top set of results shows the efficiency for TEpolarizations, with different curves in the drawing corresponding todifferent transmitted and reflected orders and showing how theefficiency varies with grating depth. The bottom set of resultssimilarly shows the efficiency for TM polarizations, with differentcurves again corresponding to different transmitted and reflectedorders. In each of the two drawings, a box is drawn to indicate thedepth region over which the efficiency is at least 80%.

It is preferable to have structural characteristics of the grating thatsimultaneously maximize the TE and TM polarization efficiencies. This isfrequently impossible to achieve, but there are circumstances when bothpolarization efficiencies can be achieved greater than some acceptablethreshold value, such as greater than 70%, greater than 75%, greaterthan 80%, greater than 85%, greater than 90%, or greater than 95%. Inthe example, the TE diffraction efficiency is greater than 80% when thegrating depth is between about 0.21 and 0.28 μm and the TM diffractionefficiency is greater than 80% when the grating depth is between about0.17 and 0.22 μm. This provides a window between about 0.21 and 0.22 μmwhere the diffraction efficiencies for both polarizations may besimultaneously achieved greater than 80%.

Having fully described several embodiments of the present invention,many other equivalents or alternative embodiments of the presentinvention will be apparent to those skilled in the art. The scope of theinvention should, therefore, be determined not with reference to theabove description, but instead should be determined with reference tothe appended claims along with their full scope of equivalents.

1. A method for demultiplexing a plurality of optical signalstransmitted over an optical fiber into a silicon substrate and to aplurality of detectors, the silicon substrate having a first surface, asecond surface spaced apart from the first surface, and a diffractiveelement disposed adjacent to the second surface, each of the pluralityof optical signals corresponding to one of a plurality of wavelengths,the method comprising: directing the plurality of optical signals intothe silicon substrate along a path through the first surface to beincident on the diffractive element, wherein: the path is orientednormal with the diffractive element; and the diffractive elementangularly separates the plurality of optical signals such that each ofthe plurality of wavelengths traverses through the silicon substrate ina wavelength-dependent direction towards the first surface; and steeringeach of the plurality of optical signals from the first surface towardsthe second surface, wherein: a first of the plurality of wavelengths issubsequently incident on a first optical element that directs the firstof the plurality of wavelengths normal to the first surface and/or tothe diffractive element and incident on a first of the plurality ofdetectors; a second of the plurality of wavelengths is subsequentlyincident on a second optical element different from the first opticalelement that directs the second of the plurality of wavelengths normalto the first surface and incident on a second of the plurality ofdetectors; and the first of the plurality of wavelengths is differentfrom the second of the plurality of wavelengths.
 2. The method recitedin claim 1 wherein the diffractive element comprises the first andsecond optical elements.
 3. The method recited in claim 1 wherein thefirst and second optical elements each comprise a diffractive element.4. The method recited in claim 1 wherein the first of the plurality ofdetectors is different from the second of the plurality of detectors. 5.The method recited in claim 1 wherein steering the each of the pluralityof optical signals comprises reflecting the each of the plurality ofoptical signals.
 6. The method recited in claim 1 wherein: the pluralityof optical signals are comprised by a radiation beam; and directing theplurality of optical signals into the silicon substrate comprises expandand collimating the radiation beam.
 7. The method recited in claim 1further comprising absorbing stray radiation with a first opticalabsorber disposed adjacent to the second surface between the diffractiveelement and the first optical element.
 8. The method recited in claim 7further comprising absorbing stray radiation with a second opticalabsorber disposed adjacent to the second surface between the first andsecond optical elements.
 9. The method recited in claim 1 furthercomprising directing a third wavelength along a second path through thefirst surface to be incident on the diffractive element, wherein: thesecond path is oriented normal with the first surface and/or with thediffractive element; and the diffractive element directs the thirdwavelength substantially along the first path in a direction opposite toa direction of the plurality of optical signals.
 10. A method fordemultiplexing a plurality of optical signals over an optical fiber,each of the plurality of optical signals corresponding to one of aplurality of wavelengths, the optical fiber having an end, the methodcomprising: providing a silicon substrate defining a first surface and asecond surface confronting the first surface, the silicon substratehaving a plurality of gratings disposed adjacent to the second surface;providing an optical coupler operatively coupled with the siliconsubstrate and receiving the end of the optical fiber; directing theplurality of optical signals through the optical coupler and into thesilicon substrate along a path through the first surface so as to beincident on a first of the plurality of gratings, wherein: the path ofthe plurality of optical signals is oriented normal with the firstsurface and/or with the first grating; the first grating angularlyseparates the plurality of optical signals such that each of theplurality of wavelengths traverses through the silicon substrate in awavelength-dependent direction towards the first surface; and steeringeach of the plurality of optical signals from the first surface towardsthe second surface, wherein: a first of the plurality of wavelengths issubsequently incident on a second of the plurality of gratings thatdirects the first of the plurality of wavelengths normal to the firstsurface; a second of the plurality of wavelengths is subsequentlyincident on a third of the plurality of gratings that directs the secondof the plurality of wavelengths normal to the first surface; and thefirst of the plurality of wavelengths is different from the second ofthe plurality of wavelengths.
 11. The method recited in claim 10 whereinthe first, second, and third gratings are different from each other. 12.The method recited in claim 10 wherein steering the each of theplurality of optical signals comprises reflecting the each of theplurality of optical signals.
 13. The method recited in claim 10wherein: the plurality of optical signals are comprised by a radiationbeam; and directing the plurality of optical signals comprises expandingand collimating the radiation beam with the optical coupler.
 14. Themethod recited in claim 10 further comprising absorbing stray radiationwith a first optical absorber disposed adjacent to the second surfacebetween the first and second gratings.
 15. The method recited in claim14 further comprising absorbing stray radiation with a second opticalabsorber disposed adjacent to the second surface between the second andthird diffractive elements.
 16. The method recited in claim 10 furthercomprising directing a third wavelength along a second path through thefirst surface to be incident on the first of the plurality of gratings,wherein; the second path is oriented normal with the first surfaceand/or with the first of the plurality of gratings; and the first of theplurality of grating directs the third wavelength through the opticalcoupler along the first path in a direction opposite to a direction ofthe plurality of optical signals.
 17. The method recited in claim 10further comprising: directing the first of the plurality of wavelengthsfrom the second grating to a first of a plurality of detectors; anddirecting the second of the plurality of wavelengths from the thirdgrating to a second of the plurality of detectors.
 18. A device fordemultiplexing a plurality of optical signals transmitted over anoptical fiber, each of the plurality of optical signals corresponding toone of a plurality of wavelengths, the device comprising: a siliconsubstrate having a first surface, a second surface spaced apart from thefirst surface, and a plurality of diffractive elements disposed adjacentto the second surface; a reflective coating formed within the siliconsubstrate over the first surface; an optical absorber coating formedwithin the silicon substrate over the second surface between thediffractive elements; and a plurality of detectors, wherein: a first ofthe plurality of detectors is disposed to receive a first of theplurality of wavelengths after traversing a first path through the firstsurface to a first of the plurality of diffractive elements, from thefirst of the plurality of diffractive elements to a second of theplurality of diffractive elements after reflection from the reflectivecoating, and from the second of the plurality of diffractive elements tothe first of the plurality of detectors; a second of the plurality ofdetectors is disposed to receive a second of the plurality ofwavelengths after traversing a second path through the first surface tothe first of the plurality of diffractive elements, from the first ofthe plurality of diffractive elements to a third of the plurality ofdiffractive elements after reflection from the reflective coating, andfrom the third of the plurality of diffractive elements to the second ofthe plurality of detectors; and at least two of the first, second, orthird diffractive elements are different from each other.
 19. The devicerecited in claim 18 wherein the first of the plurality of detectors isdifferent from the second of the plurality of detectors.
 20. The devicerecited in claim 18 wherein: the first of the plurality of detectors isdisposed to receive the first wavelength along a first path normal withthe first surface and/or with the second diffractive element; and thesecond of the plurality of detectors is disposed to receive the secondwavelength along a second path normal with the first surface and/or withthe third diffractive element.
 21. The device recited in claim 18further comprising an optical coupler operatively coupled with thesilicon substrate and receiving an end of the optical fiber.
 22. Thedevice recited in claim 21 wherein the optical coupler comprises abeam-expanding and collimating optical coupler that expands andcollimates a beam comprising the plurality of optical signals.
 23. Thedevice recited in claim 18 wherein each of the plurality of diffractiveelements comprises a plurality of levels within each period of the eachof the plurality of diffractive elements.
 24. The device recited inclaim 23 wherein the number of levels is a power of two greater thantwo.
 25. The device recited in claim 18 further comprising anantireflective coating formed over each of the plurality of diffractiveelements.